High voltage pulse power supply

The high voltage pulse power supply is a kind of high voltage power supply. It outputs pulse voltage and has unique advantages in the field of driving the generation of low temperature plasma, such as high efficiency of active component production, high electron density, more easy to produce uniform large area plasma, high non-equilibrium, etc. these advantages make it perform well in the fields of wastewater treatment, medium surface treatment, food sterilization and so on. The high voltage pulse power supply developed by our research group is mainly used to drive various plasma sources to generate pulse plasma for scientific research experiments. There are many ways to realize high voltage pulse voltage output. Our research of high voltage pulse power supply is mainly based on Marx generator, which converts low DC voltage input into high pulse voltage output. The peak-to-peak output pulse voltage can reach more than 10kV, and the all-solid-state Marx generator is used to control the output pulse frequency and pulse width by controlling the on-off of the solid-state switch. Although the all-solid-state Marx generator has a complex structure and a high cost, it has stronger controllability, a wider application range, and a larger application prospect.

Marx generator and output waveform

Self-made high voltage pulse power supply drives different plasma sources